Definition
A chemically inert noble-gas element with atomic number 18, used in ionized form in semiconductor plasma processing.
Application
Used as a sputtering and plasma-process gas, including ion-bombardment steps where argon ions provide largely physical momentum transfer without introducing a strongly reactive chemistry.
Related search terms
Argon gas
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Related concepts
Evidence and further reading
- Evidence from physics.nist.govhttps://physics.nist.gov/PhysRefData/Handbook/Tables/argontable1_a.htm
- Evidence from newsroom.lamresearch.comhttps://newsroom.lamresearch.com/Tech-Brief-All-About-ALE