Definition
A surface-analysis technique that identifies elements from the characteristic energies of Auger electrons emitted after electronic excitation of the sample surface and quantifies them from measured emission intensities.
Application
Used for highly surface-sensitive analysis of contamination, thin films, interfaces and failure-analysis samples, often complementing X-ray photoelectron spectroscopy.
Related search terms
Auger spectroscopy; Auger-electron spectroscopy
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/physica-bcl-basis-quantitative-surface-analysis-auger-electron-spectroscopy-and-x-ray
- Evidence from nist.govhttps://www.nist.gov/publications/nist-databases-surface-analysis-auger-electron-spectroscopy-and-x-ray-photoelectron