Definition
Surface-sensitive spectroscopy that irradiates a material with X-rays and analyzes emitted photoelectron energies and intensities to infer elemental composition and chemical states.
Application
Used to analyze composition and estimate thickness of silicon oxynitride films in semiconductor metrology.
Related search terms
Electron Spectroscopy for Chemical Analysis (ESCA)
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Related concepts
Evidence and further reading
- Evidence from documents.thermofisher.comhttps://documents.thermofisher.com/TFS-Assets/MSD/Reference-Materials/xps-multi-technique-whitepaper-wp0018.pdf
- Evidence from tsapps.nist.govhttps://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909798