Definition
The network of backside metal interconnects and vertical connections that distributes supply and reference voltages from the wafer backside to active devices.
Application
Used in next-generation logic to deliver power through backside metal and vias to buried rails or direct device contacts, decoupling power routing from frontside signal wiring and reducing IR drop.
Related search terms
Backside power distribution network; backside PDN
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/articles/backside-power-delivery-options-dtco-study
- Evidence from imec-int.comhttps://www.imec-int.com/en/articles/imec-demonstrates-critical-building-blocks-backside-power-delivery-network