Dielectric Breakdown

13 Test, Reliability, Yield & Failure Analysis

Definition

A sudden, large increase in electrical conductivity of an insulating dielectric caused by electrical stress that creates a conductive failure path through the material.

Application

Used as a reliability limit and qualification metric for gate dielectrics, capacitor dielectrics and other insulating films; breakdown voltage or field and time-dependent dielectric breakdown behavior are monitored because defects, field and accumulated stress can reduce lifetime.

Related search terms

Insulator breakdown; oxide breakdown

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Related concepts

Evidence and further reading