Definition
High aspect ratio describes a semiconductor feature whose depth or height is large relative to its lateral width, such as a deep narrow hole, trench, or contact.
Application
High-aspect-ratio etch is critical for deep 3D NAND channels, DRAM/contact structures, through-silicon vias, and other vertically scaled features where profile control and selectivity are difficult.
Related search terms
high aspect ratio feature
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Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/product/vantex/
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/eu/en/product-library/centura-etch.html