Definition
In-line metrology is measurement performed on production wafers within the manufacturing flow to monitor process results and detect deviations before later fabrication steps.
Application
Overlay, critical-dimension, film, and related measurements are fed into process control so excursions can be identified and corrected while wafers are still moving through the fab.
Related search terms
inline metrology; production metrology
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Related concepts
Evidence and further reading
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/269/kla-tencor-launches-the-archertm-300-lcm-overlay
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/323/kla-tencor-launches-new-archer-200-overlay-metrology-system