Definition
The knock-on effect is displacement or deeper relocation of sample atoms caused by momentum transfer in energetic ion-collision cascades.
Application
Relevant to ion implantation and SIMS/sputter analysis because recoil mixing and atom displacement can broaden interfaces, alter profiles, and create lattice damage.
Related search terms
ion knock-on; recoil mixing
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Related concepts
Evidence and further reading
- Evidence from eag.comhttps://www.eag.com/app-note/sims-tutorial/
- Evidence from analyticalsciencejournals.onlinelibrary.wiley.comhttps://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/sia.5086