Definition
KOH etch is a potassium-hydroxide wet etch of crystalline silicon whose rate depends strongly on crystal orientation, producing anisotropic profiles.
Application
Used in MEMS and silicon micromachining to form V-grooves, cavities, membranes, and through-wafer features defined by crystallographic planes.
Related search terms
potassium hydroxide silicon etch; KOH silicon etch
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Related concepts
Evidence and further reading
- Evidence from nanofab.ubc.cahttps://nanofab.ubc.ca/capabilities/processes/cleaning/si-anisotropic-etch-koh-tmah/
- Evidence from ietresearch.onlinelibrary.wiley.comhttps://ietresearch.onlinelibrary.wiley.com/doi/10.1049/mnl.2019.0570