Lightly Doped Drain

09 FEOL Devices & Advanced Transistors

Notation LDD

Definition

A lightly doped drain (LDD) is a MOSFET source/drain architecture with lower-doped extension regions between the channel and heavily doped source/drain regions.

Application

Used to reduce peak electric fields and hot-carrier degradation in scaled MOSFETs, with tradeoffs including added series resistance.

Related search terms

LDD; lightly doped drain extension

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Related concepts

Evidence and further reading

  • Evidence from research.ibm.comhttps://research.ibm.com/publications/an-analytical-one-dimensional-model-for-lightly-doped-drain-ldd-mosfet-devices
  • Evidence from research.ibm.comhttps://research.ibm.com/publications/design-and-characteristics-of-a-lightly-doped-drain-ldd-device-fabricated-with-self-aligned-titanium-disilicide