Definition
In a conventional doped MOSFET, a shallow doped portion of the source or drain that lies between the deeper source/drain region and the transistor channel.
Application
Used to limit source/drain depletion into the channel and control short-channel effects while retaining deeper source/drain regions for low-resistance contacts.
Related search terms
S/D extension
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Related concepts
Evidence and further reading
- Evidence from escholarship.orghttps://escholarship.org/content/qt0qj1q0fk/qt0qj1q0fk.pdf
- Evidence from pure.kaist.ac.krhttps://pure.kaist.ac.kr/en/publications/defect-free-ultra-shallow-sourcedrain-extension-using-spin-on-dop/