Definition
Statistical evaluation of variation and error contributed by a measurement system, including characteristics such as repeatability, reproducibility, bias, linearity, and stability.
Application
Used to determine whether semiconductor metrology, inspection, or test measurements are capable enough to support process-control and manufacturing decisions.
Related search terms
measurement systems analysis
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Related concepts
Evidence and further reading
- Evidence from jmp.comhttps://www.jmp.com/en/statistics-knowledge-portal/quality-and-reliability-methods/measurement-systems-analysis
- Evidence from doi.orghttps://doi.org/10.1109/DELTA.2006.62