Definition
A wafer with characterized or traceably calibrated properties, dimensions or test structures that serves as a reference for calibrating or verifying semiconductor measurement equipment.
Application
Used to establish or check metrology accuracy for measurements such as wafer thickness, overlay, critical dimension, temperature or electrical parameters and to support tool-to-tool measurement traceability.
Related search terms
Reference wafer; wafer calibration standard
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Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/calibrated-overlay-wafer-standard
- Evidence from nist.govhttps://www.nist.gov/publications/interferometric-thickness-calibration-300mm-silicon-wafers