Definition
A non-product wafer processed or measured to monitor semiconductor equipment or process condition rather than becoming saleable device output.
Application
Used for tool qualification, defect monitoring, troubleshooting, process characterization, and routine checks of etch, deposition, cleaning, or inspection performance.
Related search terms
test wafer; process monitor wafer
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Related concepts
Evidence and further reading
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/312/kla-tencor-introduces-new-surfscan-sp2xp-monitor-wafer
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/348/kla-tencor-extends-metrology-portfolio-with-sensarray-etch