Definition
Metal or metal-containing MOS gate electrode used in place of polysilicon as part of an advanced transistor gate stack.
Application
Used with advanced gate dielectrics in scaled CMOS to avoid polysilicon-depletion effects and enable appropriate gate-electrode electrical properties.
Related search terms
metal gate electrode; high-k metal gate
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Related concepts
Evidence and further reading
- Evidence from intel.comhttps://www.intel.com/pressroom/kits/advancedtech/doodle/ref_HiK-MG/high-k.htm
- Evidence from intel.comhttps://www.intel.com/pressroom/archive/releases/2007/20071025corp.htm