Nitric Acid

04 Thermal Processing, Implant, Doping & Oxidation

Notation HNO3

Definition

Nitric acid (HNO3) is a strong oxidizing acid used as a component of semiconductor wet-chemical formulations, including mixtures formulated to etch or clean selected materials.

Application

Used in VLSI-grade wet processing and in acid mixtures for semiconductor and thin-film fabrication; the exact chemistry is selected for the target material and process.

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