Definition
Removal of solid material through chemical reactions with liquid etchants that dissolve the reaction products.
Application
Used to etch silicon oxide and to shape silicon substrates, including crystallographic profiles produced by anisotropic etchants.
Related concepts
Evidence and further reading
- Evidence from iue.tuwien.ac.athttps://www.iue.tuwien.ac.at/phd/toifl/Anisotropic-Wet-Etching.html
- Evidence from nanoguide.stanford.eduhttps://nanoguide.stanford.edu/guide/equipment/purpose/etching/wet-etching/acid-or-base-wet-etching