Definition
Optical metrology that infers patterned-feature dimensions and three-dimensional shape from measured optical response and model fitting, often using scatterometry.
Application
Used inline to monitor critical dimensions and profile parameters in advanced logic and memory structures for lithography and process control.
Related search terms
optical CD; optical critical-dimension metrology
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Related concepts
Evidence and further reading
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/296/kla-tencor-and-tel-introduce-acushapetm-to-enhance-optical
- Evidence from spts.comhttps://www.spts.com/products/chip-manufacturing/metrology