Definition
Inspection that uses optical illumination, imaging, and photodetection to detect and classify wafer-surface, particle, and pattern anomalies without relying solely on electron-beam imaging.
Application
Used inline on patterned and unpatterned semiconductor wafers for defect discovery, excursion monitoring, and yield/process control, with SEM review often used separately for higher-resolution follow-up.
Related search terms
optical wafer inspection
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from spts.comhttps://www.spts.com/products/chip-manufacturing/defect-inspection-review
- Evidence from hitachi-hightech.comhttps://www.hitachi-hightech.com/us/en/products/semiconductor-manufacturing/cd-sem/inspection-solution/is.html