Definition
A scanning electron microscope configured to revisit wafer locations reported by defect inspection and acquire high-magnification images of those defects for detailed review and classification.
Application
Used with wafer inspection in development and production to localize defect coordinates more precisely, capture images, support automatic defect review and classification, and send categorized results into yield-management and failure-analysis workflows.
Related search terms
Review SEM; defect review scanning electron microscope
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Related concepts
Evidence and further reading
- Evidence from hitachi-hightech.comhttps://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/review-sem.html
- Evidence from hitachi-hightech.comhttps://www.hitachi-hightech.com/us/en/products/semiconductor-manufacturing/cd-sem/dr-sem/cr7300.html