Parametric Test

13 Test, Reliability, Yield & Failure Analysis

Definition

Parametric test is semiconductor electrical measurement of device or structure parameters such as current-voltage, capacitance-voltage, leakage, resistance, threshold, or breakdown behavior.

Application

Used at wafer level and during process development or production to validate device characteristics, monitor process variability, support reliability work, and identify out-of-spec electrical behavior.

Related concepts

Evidence and further reading

  • Evidence from keysight.comhttps://www.keysight.com/nl/en/products/semiconductors/parametric-test-solutions.html
  • Evidence from tek.comhttps://www.tek.com/en/news/2020-10-06-tektronix-introduces-s530-series-parametric-test-system-with-kte-7-software