Definition
Piranha clean is a strong oxidizing wet-clean chemistry based on sulfuric acid and hydrogen peroxide that removes organic and resist residues from compatible surfaces.
Application
Used on compatible wafers, substrates, and photomasks for organic-residue removal and surface preparation; material compatibility must be controlled because the chemistry is highly aggressive.
Related concepts
Evidence and further reading
- Evidence from nanoguide.stanford.eduhttps://nanoguide.stanford.edu/guide/equipment/purpose/cleaning/piranha-cleaning
- Evidence from cnfusers.cornell.eduhttps://www.cnfusers.cornell.edu/node/119