Definition
A point defect is a localized crystal-lattice defect involving one or a few lattice sites, such as a vacancy, interstitial, or substitutional impurity.
Application
Used in semiconductor defect and diffusion modeling because vacancies, interstitials, and substitutional point defects can distort the silicon lattice and participate in lattice-diffusion mechanisms.
Related search terms
Zero-dimensional crystal defect
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/publications/multiscale-modeling-point-defects-strained-silicon
- Evidence from nist.govhttps://www.nist.gov/publications/diffusivity-and-mobility-data