Definition
An unintended physical, structural or material irregularity in a semiconductor wafer or fabricated feature that departs from the desired crystal, surface or pattern condition and can degrade device function, reliability or yield.
Application
Monitored from incoming wafer through fabrication because particles, crystal imperfections, residues, scratches and pattern anomalies can create electrical failures or yield loss. Inspection and review classify defects so their process source can be corrected.
Related search terms
Wafer defect; semiconductor defect
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Related concepts
Evidence and further reading
- Evidence from hitachi-hightech.comhttps://www.hitachi-hightech.com/global/en/knowledge/semiconductor/room/manufacturing/inspection.html
- Evidence from semiconductors.orghttps://www.semiconductors.org/wp-content/uploads/2018/08/2007FEP.pdf