Definition
The number of defects normalized to a sampled area, commonly reported for wafers or process layers as defects per unit area such as defects/cm²; the relevant defect population and size threshold must be stated for meaningful comparison.
Application
Used to trend process defectivity, compare wafers or process areas on a common basis, and as an input to random-defect and critical-area yield models; lower relevant defect density generally improves defect-limited yield.
Related search terms
Defects per unit area; defectivity
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Related concepts
Evidence and further reading
- Evidence from semiconductors.orghttps://www.semiconductors.org/wp-content/uploads/2018/08/2007FEP.pdf
- Evidence from kla.comhttps://www.kla.com/documents/4.3_Toward_Zero_Defect_-_Best_Performing_Tools_Robinson_KLA.pdf