Definition
Radicals are chemical species with an unpaired electron. Semiconductor plasma processing commonly uses reactive, electrically neutral radicals generated in a plasma.
Application
In plasma etching and atomic layer etching, radicals participate in surface reactions and can drive chemical material-removal steps without relying on directional ion bombardment.
Related search terms
Reactive radical; Plasma radical
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Related concepts
Evidence and further reading
- Evidence from semiconductors.orghttps://www.semiconductors.org/wp-content/uploads/2023/07/FINAL-PFAS-Containing-Articles-Used-in-Semiconductor-Manufacturing.pdf
- Evidence from goldbook.iupac.orghttps://goldbook.iupac.org/terms/view/R05066/plain