Definition
For a semiconductor wafer, the range of signed distances from its median surface to a reference plane, evaluated with the wafer free and unclamped over the specified measurement area.
Application
Used in wafer geometry inspection to characterize wafer-shape distortion.
Related concepts
Evidence and further reading
- Evidence from semi.orghttps://www.semi.org/sites/semi.org/files/2023-12/CompilationTerms1023.pdf
- Evidence from micro-epsilon.comhttps://www.micro-epsilon.com/applications/industries/semiconductors-wafers/bow-and-warp-of-wafers/