Definition
A scanning-probe microscopy technique in which a nanoscale tip is rastered over a surface and tip-sample forces are measured to reconstruct topography or other local material properties.
Application
Used in semiconductor metrology to measure nanoscale height, pitch, linewidth, roughness, mechanical properties and electrical behavior, and to calibrate or validate other dimensional measurements.
Related search terms
Atomic-force microscopy; scanning-probe AFM
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from nist.govhttps://www.nist.gov/mml/mmsd/primary-focus-areas/semiconductors
- Evidence from nist.govhttps://www.nist.gov/publications/progress-towards-accurate-metrology-using-atomic-force-microscopy