Definition
Profilometry is the measurement of surface topography using contact-stylus or non-contact optical profiling methods to characterize vertical surface features such as step height, roughness, and profile shape.
Application
Used in semiconductor process development and control to measure etched or deposited step heights and CMP-related topography such as dishing, erosion, and bump height.
Related search terms
Surface profilometry; Surface profiling
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Related concepts
Evidence and further reading
- Evidence from ir.kla.comhttps://ir.kla.com/news-events/press-releases/detail/363/kla-tencor-drives-semiconductor-profiling-technology-to
- Evidence from nist.govhttps://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sensofar-optical-profilometer