CFET

09 FEOL Devices & Advanced Transistors

Notation CFET

Definition

A CMOS device architecture that vertically stacks n-type and p-type field-effect transistors so their separation is moved from the lateral plane into the vertical direction.

Application

Developed for logic scaling beyond nanosheet GAA devices because vertical nFET/pFET stacking can reduce standard-cell footprint and create more routing flexibility at extremely tight pitches.

Related search terms

Complementary FET; complementary field-effect transistor

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Related concepts

Evidence and further reading

  • Evidence from imec-int.comhttps://www.imec-int.com/en/articles/imec-puts-complementary-fet-cfet-logic-technology-roadmap
  • Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-demonstrates-functional-monolithic-cfet-devices-stacked-bottom-and-top-contacts