Diffusion Barrier

Definition

A material layer placed between adjacent materials to inhibit unwanted atomic interdiffusion across their interface.

Application

Used in semiconductor interconnects and contacts to prevent copper or other species from migrating into surrounding dielectrics or silicon; a useful barrier must remain continuous and stable while meeting resistance, adhesion and integration requirements.

Related concepts

• Barrier Layer
• Copper Barrier
• Copper Interconnect
• Diffusion

Evidence and further reading

• Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/product-library/endura-amber-pvd.html
• Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/blog/blog-posts/challenges-to-interconnect-scaling-at-3nm-and-beyond.html