Definition
On-chip electrical wiring and vias formed primarily from copper to carry signals, power and ground through the back-end interconnect stack.
Application
Used in modern BEOL metallization because copper's low resistivity helps reduce line resistance and RC delay. Integration typically combines patterned dielectrics with barriers, seed layers, electroplated copper and CMP.
Related search terms
Copper wiring; copper metallization
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Related concepts
Evidence and further reading
- Evidence from lamresearch.comhttps://www.lamresearch.com/product/sabre/
- Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-demonstrates-complete-copper-interconnect