Definition
Hydrogen fluoride (HF) is the molecular hydrogen-halide species used in anhydrous or vapor-phase semiconductor processes; in water it forms hydrofluoric acid.
Application
Anhydrous/vapor HF selectively removes silicon oxide in MEMS release and other wafer processes and is also used in surface-reaction schemes for atomic-layer etching of dielectric films.
Related search terms
anhydrous HF; vapor HF
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Related concepts
Evidence and further reading
- Evidence from snfguide.stanford.eduhttps://snfguide.stanford.edu/guide/equipment/spts-uetch-vapor-etch-uetch
- Evidence from onlinelibrary.wiley.comhttps://onlinelibrary.wiley.com/doi/full/10.1002/smtd.202501744