Definition
Metal–insulator–metal stack in which an insulating dielectric layer separates two metal electrodes; in integrated circuits it is commonly implemented as a capacitor.
Application
Used for integrated analog/RF capacitors and decoupling structures in BEOL-compatible processes; very thin MIM structures may also be used for tunneling devices.
Related search terms
MIM structure; MIM capacitor
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Related concepts
Evidence and further reading
- Evidence from technav.ieee.orghttps://technav.ieee.org/topic/mim-devices/
- Evidence from nist.govhttps://www.nist.gov/publications/advanced-capacitance-metrology-nanoelectronic-device-characterization