Definition
The semiconductor fabrication processes that form conductive metal features, including contacts, vias, and interconnect lines, to electrically connect devices and circuit levels.
Application
Used in interconnect integration to create low-resistance conductive paths between transistor terminals and progressively higher wiring levels.
Related search terms
metal interconnect formation
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/articles/semi-damascene-metallization-inflection-point-back-end-line-processing
- Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-demonstrates-16nm-pitch-ru-lines-record-low-resistance-obtained-using-semi-damascene