Definition
The integration region centered on transistor contacts and local interconnect that connects completed device terminals to the upper interconnect wiring stack.
Application
Used to form and optimize source/drain and gate contacts, local interconnect, contact resistance, and the transition from transistor fabrication to higher wiring levels.
Related search terms
middle-of-line
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/middle-of-line-rc-performance-study-at-the-7-nm-node
- Evidence from research.ibm.comhttps://research.ibm.com/publications/vertical-transport-nanosheet-technology-for-scaling-beyond-the-lateral-transport-devices-cmos-era