Definition
A deliberately formed conductive structure that electrically connects a transistor terminal or semiconductor region to local or back-end interconnect wiring.
Application
Used to carry current between source/drain or gate regions and the metal interconnect stack. Contact material, interface quality, area and resistivity are critical because contact resistance can dominate parasitic resistance at advanced nodes.
Related search terms
Transistor contact; source/drain contact; local contact
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Related concepts
Evidence and further reading
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/newsroom/blogs/powering-the-next-era-of-contact-scaling-with-ald-molybdenum.html
- Evidence from imec-int.comhttps://www.imec-int.com/en/press/imec-proposes-double-row-cfet-a7-technology-node