Definition
The electrical resistance associated with current crossing a contact interface and flowing through the contact structure between two adjoining conductive or semiconductor regions.
Application
Used as a critical parasitic metric for source/drain and other device contacts. As contact area shrinks, contact resistance can dominate total access resistance and reduce transistor drive current and energy efficiency.
Related search terms
Electrical contact resistance
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Related concepts
Evidence and further reading
- Evidence from imec-int.comhttps://www.imec-int.com/en/imec-magazine/imec-magazine-april-2019/solving-the-contact-resistance-challenge-for-7nm-and-beyond-cmos
- Evidence from appliedmaterials.comhttps://www.appliedmaterials.com/us/en/product-library/endura-volta-selective-w-cvd.html