Kelvin Contact

10 BEOL Interconnect & Metallization

Definition

A Kelvin contact is a four-terminal electrical contact arrangement that separates current-force and voltage-sense paths to minimize lead and contact resistance error.

Application

Used in semiconductor test structures and metrology for accurate low-resistance measurements such as contact, sheet, interconnect, and package resistance.

Related search terms

four-terminal contact; Kelvin connection

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Related concepts

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