Specific Contact Resistivity

10 BEOL Interconnect & Metallization

Notation ρc

Definition

An interface-resistance parameter defined at zero bias as ρc = (dJ/dV)⁻¹, where J is current density across the contact and V is its voltage drop; its units are resistance × area, commonly Ω·cm².

Application

Used to characterize contact quality and extract interface contributions with methods such as transfer-length or Kelvin measurements, accounting for sheet resistance and current crowding.

Related search terms

Contact resistivity; Specific contact resistance

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Related concepts

Evidence and further reading