Definition
A process that introduces or reacts nitrogen with a semiconductor surface or material to form a nitrogen-containing layer or region, such as silicon nitride or a nitrided interface.
Application
Used in semiconductor surface and dielectric engineering, including plasma nitridation of silicon wafers and formation or modification of nitrogen-containing films and interfaces.
Related search terms
nitriding
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Related concepts
Evidence and further reading
- Evidence from research.ibm.comhttps://research.ibm.com/publications/nitridation-of-silicon-in-a-multiwafer-plasma-system
- Evidence from ceramics.onlinelibrary.wiley.comhttps://ceramics.onlinelibrary.wiley.com/doi/abs/10.1111/j.1151-2916.1976.tb10966.x