Definition
Projected range (Rp) is the mean penetration distance of implanted ions measured along the incident-beam direction from the target surface after the ions lose energy and come to rest in the material.
Application
Used in ion-implant process design to estimate dopant-depth placement from ion species and implant energy; together with range straggle it describes the depth distribution that influences junction and doping profiles.
Related search terms
Ion projected range; Mean projected range
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Related concepts
Evidence and further reading
- Evidence from impact.ornl.govhttps://impact.ornl.gov/en/publications/molecular-effect-on-projected-range-in-ultralow-energy-ion-implan/
- Evidence from ebooks.inflibnet.ac.inhttps://ebooks.inflibnet.ac.in/msp10/chapter/ion-implantation/