Definition
The statistical spread of implanted-ion penetration depth about the projected range; longitudinal range straggle is the standard deviation, ΔRp, of the depth distribution along the incident-ion direction.
Application
Used with projected range to estimate implanted dopant-depth distributions for ion-implant process design and junction engineering; lateral spread is described by a separate transverse straggle parameter.
Related search terms
Projected-range straggle; Longitudinal straggle
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Related concepts
Evidence and further reading
- Evidence from ebooks.inflibnet.ac.inhttps://ebooks.inflibnet.ac.in/msp10/chapter/ion-implantation/
- Evidence from jnep.sumdu.edu.uahttps://jnep.sumdu.edu.ua/en/full_article/1394