Definition
Pyrometry is non-contact temperature measurement that senses radiation emitted by an object and converts the detected optical or infrared energy into temperature data.
Application
In semiconductor equipment, pyrometers provide in-situ non-contact process-temperature measurement; specialized systems directly measure wafer surface temperature and support reactor temperature control in GaN MOCVD epitaxy.
Related search terms
Optical pyrometry; Radiation thermometry
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from advancedenergy.comhttps://www.advancedenergy.com/en-us/products/sense-and-measurement/thermal-sensing/special-materials-pyrometers/sekidenko-or400t/
- Evidence from advancedenergy.comhttps://www.advancedenergy.com/en-us/products/sense-and-measurement/thermal-sensing/special-materials-pyrometers/uv-400/