Rapid Thermal Processing

Definition

Single-wafer thermal processing that uses rapid, tightly controlled heating and cooling over short process cycles.

Application

Used for temperature-sensitive semiconductor thermal steps such as spike annealing, where ramp rate, peak temperature, dwell time, and cooldown must be controlled while minimizing thermal budget.

Related concepts

• Rapid Thermal Anneal
• Spike Anneal
• Thermal Budget
• Anneal

Evidence and further reading

• Evidence from ir.appliedmaterials.comhttps://ir.appliedmaterials.com/news-releases/news-release-details/applied-materials-takes-rtp-technology-next-level-new-radiance
• Evidence from annealsys.comhttps://www.annealsys.com/product-sheets/rtp-furnace/