Definition
A quartz crystal microbalance (QCM) is a quartz-crystal sensor system used to monitor thin-film deposition by measuring crystal frequency and reporting deposition rate, thickness, or mass.
Application
Used for in-situ thin-film monitoring; QCM sensors and controllers support rate and thickness measurement, and specialized high-temperature QCM sensors extend the technique to atomic layer deposition environments.
Related search terms
Quartz microbalance; Quartz crystal monitor
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Related concepts
Evidence and further reading
- Evidence from inficon.comhttps://www.inficon.com/en/products/thin-film-technology/sqm-160
- Evidence from inficon.comhttps://www.inficon.com/en/products/thin-film-technology/ald-sensor