Definition
Optical metrology that measures reflected light, often as a function of wavelength, and analyzes the reflectance response to determine thin-film properties such as thickness and refractive index.
Application
Used for rapid noncontact monitoring of deposited or etched film thickness, optical constants, and film uniformity during semiconductor process characterization and control.
Related search terms
Thin-film reflectometry; Spectral reflectometry
Search phrases help you find this entry; their meaning depends on the context shown here.
Related concepts
Evidence and further reading
- Evidence from filmetrics.comhttps://www.filmetrics.com/products/instruments/thin-film-reflectometers
- Evidence from nist.govhttps://www.nist.gov/laboratories/tools-instruments/nanofab-tool-filmetrics-f40-uv-reflectometer