Definition
A plasma generated or sustained by radio-frequency electrical power; common semiconductor reactors use capacitive electrode coupling or inductive coil coupling.
Application
Provides reactive species and, where used, energetic ions for material removal in plasma etching and film growth in plasma-enhanced deposition.
Related search terms
radio-frequency plasma
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Related concepts
Evidence and further reading
- Evidence from sentech.comhttps://sentech.com/products/si-500/
- Evidence from mks.comhttps://www.mks.com/n/pulsed-radio-frequency-rf-solution-for-critical-processes/support