Scanning Probe Microscope

Definition

A microscope that scans a sharp probe close to a sample surface and senses local tip–sample interactions to map topography or other surface properties.

Application

Used to characterize semiconductor surface topography; electrical scanning-probe modes can map local electrical properties, including dopant distributions in transistor cross sections.

Related concepts

• Atomic Force Microscopy
• Metrology
• Dopant
• Scanning Electron Microscopy

Evidence and further reading

• Evidence from nvlpubs.nist.govhttps://nvlpubs.nist.gov/nistpubs/sp958-lide/html/214-218.html
• Evidence from nist.govhttps://www.nist.gov/programs-projects/electrical-scanning-probe-microscopy