Definition
An electron-microscopy technique in which a focused electron probe scans a thin specimen and electrons passing through it, including scattered electrons, are detected to form an image.
Application
Used to image semiconductor device structures and, with energy-dispersive X-ray spectroscopy or electron energy-loss spectroscopy, analyze their composition.
Related concepts
Evidence and further reading
- Evidence from jeol.comhttps://www.jeol.com/words/emterms/20121023.055058.php
- Evidence from thermofisher.comhttps://www.thermofisher.com/us/en/home/semiconductors/tem-imaging.html